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... 1973, a new type of lithography equipment (the prototype of PAS2000) was successfully developed, and it achieved certain success in overall performance research and development. However, due to the high cost and a series of technical problems, it was not finally launched.

At the same time, Philips once planned to shut down the lithography equipment R&D department because other equipment manufacturers made breakthroughs in solving the defects of contact lithography machines with diffe ...

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